Nova 600 NanoLab

Nova 600 NanoLab

nanolab600

 

Electron Optics

  • Field Emission-SEM column
  • Resolution at optimum WD (High-vacuum)
    – 1.0 nm at 15 kV (TLD-SE)
    – 1.8 nm at 1 kV (TLD-SE)
    – 0.8 nm at 30 kV (STEM)
  • Accelerating voltage: 200 V – 30 kV
  • Probe current: 0.3 pA – 22 nA continuously adjustable
  • Max. horizontal field width: 3.9 mm at 5 mm WD (corresponds to 30 x minimum magnification in quad view)

Imaging

  • In-lens SE detector (TLD-SE)
  • In-lens BSE detector (TLD-BSE)
  • Everhardt-Thornley SED
  • IR-CCD
  • TV-rate Solid-State BSED
  • TV-rate low vacuum Solid-State BSED (GAD)
  • STEM detector

3rd party accessories

  • Oxford EDS
  • EBSD 3D
  • Nanomanipulator
  • Lithography systems