Tecnai 20 FEG
Electron Source
- Schottky Field emitter
- High voltage range 20 – 200kV
Imaging
- Tietz CCD camera 1024×1024
- SIS CCD camera MegaView II
- AnalySIS Pro
- Plate camera with 56 sheets of film
Specimen stage
- CompuStage
- Single-tilt
- Double-tilt holder
- Single-tilt low-background holder
STEM
- Bright Field and Annular Dark Field mode
- Secondary Electron Detector
Micro-analysis
- EDX
Objective lens
| Objective lens | TWIN (high tilt) |
| Point resolution (nm) | 0.27 |
| Line resolution (nm) | 0.14 |
| Information limit (nm) | |
| Attainable | <0.17 |
| Cs objective (mm) | 2.0 |
| Cc objective (mm) | 2.0 |
| Focal length (mm) | 2.7 |
| Minimum focus step (nm) | 3.0 |
| Maximum eucentric tilt | ± 70° |
| TEM magnification | 25x – 700 kx |
| SA diffraction camera length (mm) | 55 – 6000 |
| Maximum diffraction half angle | ± 10° |
| STEM magnification | 100x – 10000kx |
| HR STEM resolution (nm) | 0.34 |