XL30S FEG

 

Electron Source

• Schottky Field emitter
• High voltage range 20 eV – 30 kV

Imaging

• Compact in-the-lens detector
• Secondary Electron detector
• Low kV back scatter detector
• Cathode Luminescence detector
• AnalySIS Pro

Micro-analysis

• Embedded EDAX

Microcrystallography

• Electron Backscatter Diffraction (EBSD)